Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.jmmm.2006.01.177
Title: Consideration and compensation of calibration falloff for optical flying height measurement
Authors: Ye, H.Y.
Jiang, Y.
Liu, B.
Al Mamun, A. 
Keywords: Calibration
Falloff compensation
Flying height
Head-disk spacing
Interferometry
Issue Date: Aug-2006
Source: Ye, H.Y., Jiang, Y., Liu, B., Al Mamun, A. (2006-08). Consideration and compensation of calibration falloff for optical flying height measurement. Journal of Magnetism and Magnetic Materials 303 (2 SPEC. ISS.) : e91-e96. ScholarBank@NUS Repository. https://doi.org/10.1016/j.jmmm.2006.01.177
Abstract: In sub-10 nm low flying height (FH) region, system calibration is a significant challenge to achieve precise FH measurement. Unloading calibration mechanism is utilized for every FH measurement using three-wavelength interferometry. Our experiment has shown that the cutoff frequency of photodetectors and the bandwidth of optical filters induce calibration falloff during the calibration process. As a result, the FH measured is underestimated, i.e., the FH measured is lower than its true value. In this paper, mathematical models are proposed to eliminate the side effects due to the bandwidth of optical filters and the cutoff frequency of photodetectors. Results indicate that the proposed compensation schemes are effective in terms of improving the calibration accuracy. © 2006 Elsevier B.V. All rights reserved.
Source Title: Journal of Magnetism and Magnetic Materials
URI: http://scholarbank.nus.edu.sg/handle/10635/55404
ISSN: 03048853
DOI: 10.1016/j.jmmm.2006.01.177
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