Please use this identifier to cite or link to this item: https://doi.org/1/174
Title: Behavioural modelling and system-level simulation of micromechanical beam resonators
Authors: Khine, L.
Palaniapan, M. 
Issue Date: 1-Apr-2006
Source: Khine, L.,Palaniapan, M. (2006-04-01). Behavioural modelling and system-level simulation of micromechanical beam resonators. Journal of Physics: Conference Series 34 (1) : 1053-1058. ScholarBank@NUS Repository. https://doi.org/1/174
Abstract: This paper presents a behavioural modelling technique for micromechanical beam resonators that enables the simulation of MEMS resonator model in Analog Hardware Description Language (AHDL) format within a system-level circuit simulation. A 1.13 MHz clamped-clamped beam and a 10.4 MHz free-free beam resonators have been modelled into Verilog-A code and successfully simulated with Spectre in Cadence. Analysis has shown that both models behave well and their electrical characteristics are in agreement with the theory. © 2006 IOP Publishing Ltd.
Source Title: Journal of Physics: Conference Series
URI: http://scholarbank.nus.edu.sg/handle/10635/55196
ISSN: 17426588
DOI: 1/174
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