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|Title:||Behavioural modelling and system-level simulation of micromechanical beam resonators|
|Source:||Khine, L.,Palaniapan, M. (2006-04-01). Behavioural modelling and system-level simulation of micromechanical beam resonators. Journal of Physics: Conference Series 34 (1) : 1053-1058. ScholarBank@NUS Repository. https://doi.org/1/174|
|Abstract:||This paper presents a behavioural modelling technique for micromechanical beam resonators that enables the simulation of MEMS resonator model in Analog Hardware Description Language (AHDL) format within a system-level circuit simulation. A 1.13 MHz clamped-clamped beam and a 10.4 MHz free-free beam resonators have been modelled into Verilog-A code and successfully simulated with Spectre in Cadence. Analysis has shown that both models behave well and their electrical characteristics are in agreement with the theory. © 2006 IOP Publishing Ltd.|
|Source Title:||Journal of Physics: Conference Series|
|Appears in Collections:||Staff Publications|
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