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|Title:||Analysis of high-power devices using proton beam induced charge microscopy|
|Citation:||Zmeck, M., Phang, J., Bettiol, A., Osipowicz, T., Watt, F., Balk, L., Niedernostheide, F.-J., Schulze, H.-J., Falck, E., Barthelmess, R. (2001-09). Analysis of high-power devices using proton beam induced charge microscopy. Microelectronics Reliability 41 (9-10) : 1519-1524. ScholarBank@NUS Repository. https://doi.org/10.1016/S0026-2714(01)00159-7|
|Abstract:||Ion beam induced charge microscopy (IBIC microscopy) has been used for several years to analyse various types of semiconductor devices. In this paper the potential of IBIC-microscopy for the analysis of deeply buffed structures of high power devices is discussed. The advantages of the analysis of charge collection spectra taken under reverse voltages (at around 10% of the design value) are discussed. In this work a high-voltage diode with a field ring structure has been analysed using a 2 MeV proton beam applying bias voltages up to 500 V. © 2001 Elsevier Science Ltd. All rights reserved.|
|Source Title:||Microelectronics Reliability|
|Appears in Collections:||Staff Publications|
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