Please use this identifier to cite or link to this item: https://doi.org/10.1016/S0304-3991(02)00288-7
Title: Aberration characteristics of immersion lenses for LVSEM
Authors: Khursheed, A. 
Keywords: Immersion lenses
Low voltage scanning electron microscopy (LVSEM)
On-axis aberrations
Issue Date: Dec-2002
Source: Khursheed, A. (2002-12). Aberration characteristics of immersion lenses for LVSEM. Ultramicroscopy 93 (3-4) : 331-338. ScholarBank@NUS Repository. https://doi.org/10.1016/S0304-3991(02)00288-7
Abstract: This paper investigates the on-axis aberration characteristics of various immersion objective lenses for low voltage scanning electron microscopy (LVSEM). A simple aperture lens model is used to generate smooth axial field distributions. The simulation results show that mixed field electric-magnetic immersion lenses are predicted to have between 1.5 and 2 times smaller aberration limited probe diameters than their pure-field counterparts. At a landing energy of 1 keV, mixed field immersion lenses operating at the vacuum electrical field breakdown limit are predicted to have on-axis aberration coefficients between 50 and 60 μm, yielding an ultimate image resolution of below 1 nm. These aberrations lie in the same range as those for LVSEM systems that employ aberration correctors. © 2002 Elsevier Science B.V. All rights reserved.
Source Title: Ultramicroscopy
URI: http://scholarbank.nus.edu.sg/handle/10635/54856
ISSN: 03043991
DOI: 10.1016/S0304-3991(02)00288-7
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