Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.elspec.2011.08.003
Title: A wide-range Parallel Radial Mirror Analyzer for scanning electron/ion microscopes
Authors: Khursheed, A. 
Hoang, H.Q. 
Srinivasan, A.
Keywords: Auger electron microscopy
Parallel electron energy analyzer
Scanning electron microscope
Issue Date: Jan-2012
Source: Khursheed, A.,Hoang, H.Q.,Srinivasan, A. (2012-01). A wide-range Parallel Radial Mirror Analyzer for scanning electron/ion microscopes. Journal of Electron Spectroscopy and Related Phenomena 184 (11-12) : 525-532. ScholarBank@NUS Repository. https://doi.org/10.1016/j.elspec.2011.08.003
Abstract: This paper presents the design of a wide-range Parallel Radial Mirror Analyzer (RMA) for use as an attachment inside the specimen chambers of scanning electron/ion microscopes. The range of energies for the PRMA typically varies by a factor of 50, and it is predicted to have second-order focusing properties for all electrons/ions that are detected. For a polar angular spread of ±3°, the simulated energy resolution at an energy of 100 eV is around 0.65%, and it drops to less than 0.2% for energies between 300 eV and 5000 eV. The PRMA is predicted to have a transmittance of over an order magnitude better than previous wide-range parallel energy analyzer designs. © 2011 Elsevier B.V. All rights reserved.
Source Title: Journal of Electron Spectroscopy and Related Phenomena
URI: http://scholarbank.nus.edu.sg/handle/10635/54852
ISSN: 03682048
DOI: 10.1016/j.elspec.2011.08.003
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