Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/54791
Title: A robust focusing and astigmatism correction method for the scanning electron microscope
Authors: Ong, K.H.
Phang, J.C.H. 
Thong, J.T.L. 
Keywords: Astigmatism correction
Automation
Focusing
Fourier transforms
Scanning electron microscopy
Issue Date: Nov-1997
Source: Ong, K.H.,Phang, J.C.H.,Thong, J.T.L. (1997-11). A robust focusing and astigmatism correction method for the scanning electron microscope. Scanning 19 (8) : 553-563. ScholarBank@NUS Repository.
Abstract: This paper discusses a new approach to focusing and astigmatism correction based on the fast fourier transforms (FFTs) of scanning electron microscopy (SEM) images. From the FFTs, it is possible to obtain information on the severity of the defocus and astigmatism. This information is then processed by an algorithm to perform real-time focusing and astigmatism correction on the SEM. The algorithm has been tested on defocused and astigmatic images of different samples, including those with highly directional features. Experiments show that the images obtained after running the algorithm can be as good as those that an experienced SEM operator can achieve.
Source Title: Scanning
URI: http://scholarbank.nus.edu.sg/handle/10635/54791
ISSN: 01610457
Appears in Collections:Staff Publications

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