Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.nima.2011.01.085
Title: A radial mirror analyzer for scanning electron/ion microscopes
Authors: Hoang, H.Q. 
Khursheed, A. 
Keywords: Charged particle energy analyzer
Electron energy analyzer
Radial mirror analyzer
Scanning electron microscopy
Issue Date: 11-Apr-2011
Source: Hoang, H.Q., Khursheed, A. (2011-04-11). A radial mirror analyzer for scanning electron/ion microscopes. Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 635 (1) : 64-68. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nima.2011.01.085
Abstract: This paper presents a high-resolution transmittance electron energy analyzer suitable for use as an attachment inside the specimen chambers of scanning electron/ion microscopes. The analyzer uses a rotationally symmetric electric field distribution to transport electrons/ions emitted from a central point source in a radial direction on to a ring-shaped collection/detection area. The analyzer is designed to fit around a conical shaped objective lens pole-piece/electrode, allowing for a relatively short minimum working distance, 5 mm or less. Simulation results for the analyzer design predict that it will have a relative energy resolution of 0.025% for an entrance angular spread of ±6°, around an order of magnitude better then the well-known Cylindrical Mirror Analyzer (CMA). The analyzer design allows for a parallel mode of operation in which the energy bandwidth on a conical shaped detection plane is predicted to be as high as 32% (±16%) of the central-band energy. On a flat ring-shaped detection plane, the energy bandwidth is predicted to be around 12% (±6%) of the central-band energy, over which the simulated relative energy resolution remains below 0.06% for angular spreads of ±6°. © 2011 Elsevier B.V. All rights reserved.
Source Title: Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
URI: http://scholarbank.nus.edu.sg/handle/10635/54763
ISSN: 01689002
DOI: 10.1016/j.nima.2011.01.085
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