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|Title:||A multilayer correction scheme for spreading resistance measurements|
|Authors:||Choo, S.C. |
|Source:||Choo, S.C.,Leong, M.S.,Hong, H.L.,Li, L.,Tan, L.S. (1977-10). A multilayer correction scheme for spreading resistance measurements. Solid State Electronics 20 (10) : 839-848. ScholarBank@NUS Repository.|
|Abstract:||This paper presents a method for computing the correction factor integral that arises in Schumann and Gardner's multilayer theory for spreading resistance measurements. From a detailed analysis of the integrand, a numerical scheme has been devised in which the integration is carried out with typically less than 150 integrand values and most of the functional values needed in the integration are pre-calculated and stored. The numerical scheme has been implemented on both an IBM 1130 System and a Univac 1106 Time Sharing System, and used to correct the spreading resistance profile of a buried layer structure. The results indicate that routine application of the multilayer theory is now practicable on either a minicomputer or a time sharing system. © 1977.|
|Source Title:||Solid State Electronics|
|Appears in Collections:||Staff Publications|
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