Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/54450
Title: A multilayer correction scheme for spreading resistance measurements
Authors: Choo, S.C. 
Leong, M.S. 
Hong, H.L.
Li, L.
Tan, L.S. 
Issue Date: Oct-1977
Source: Choo, S.C.,Leong, M.S.,Hong, H.L.,Li, L.,Tan, L.S. (1977-10). A multilayer correction scheme for spreading resistance measurements. Solid State Electronics 20 (10) : 839-848. ScholarBank@NUS Repository.
Abstract: This paper presents a method for computing the correction factor integral that arises in Schumann and Gardner's multilayer theory for spreading resistance measurements. From a detailed analysis of the integrand, a numerical scheme has been devised in which the integration is carried out with typically less than 150 integrand values and most of the functional values needed in the integration are pre-calculated and stored. The numerical scheme has been implemented on both an IBM 1130 System and a Univac 1106 Time Sharing System, and used to correct the spreading resistance profile of a buried layer structure. The results indicate that routine application of the multilayer theory is now practicable on either a minicomputer or a time sharing system. © 1977.
Source Title: Solid State Electronics
URI: http://scholarbank.nus.edu.sg/handle/10635/54450
ISSN: 00381101
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.

Page view(s)

40
checked on Dec 15, 2017

Google ScholarTM

Check


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.