Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.ultramic.2004.12.005
Title: A method of dynamic chromatic aberration correction in low-voltage scanning electron microscopes
Authors: Khursheed, A. 
Keywords: Chromatic aberration
Low-voltage scanning electron microscope
Time-of-flight spectrometer
Issue Date: Jul-2005
Source: Khursheed, A. (2005-07). A method of dynamic chromatic aberration correction in low-voltage scanning electron microscopes. Ultramicroscopy 103 (4) : 255-260. ScholarBank@NUS Repository. https://doi.org/10.1016/j.ultramic.2004.12.005
Abstract: A time-of-flight concept that dynamically corrects for chromatic aberration effects in scanning electron microscopes (SEMs) is presented. The method is predicted to reduce the microscope's chromatic aberration by an order of magnitude. The scheme should significantly improve the spatial resolution of low-voltage scanning electron microscopes (LVSEMs). The dynamic means of correcting for chromatic aberration also allows for the possibility of obtaining high image resolution from electron guns that have relatively large energy spreads. © 2004 Elsevier B.V. All rights reserved.
Source Title: Ultramicroscopy
URI: http://scholarbank.nus.edu.sg/handle/10635/54362
ISSN: 03043991
DOI: 10.1016/j.ultramic.2004.12.005
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