Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.sna.2008.12.002
Title: A MEMS-based resonant-scanning lamellar grating Fourier transform micro-spectrometer with laser reference system
Authors: Lee, F.
Zhou, G. 
Yu, H. 
Chau, F.S. 
Keywords: Fourier transform
Lamellar gratings
MEMS
Reference sampling
Resonant
Spectrometer
Issue Date: 16-Feb-2009
Source: Lee, F., Zhou, G., Yu, H., Chau, F.S. (2009-02-16). A MEMS-based resonant-scanning lamellar grating Fourier transform micro-spectrometer with laser reference system. Sensors and Actuators, A: Physical 149 (2) : 221-228. ScholarBank@NUS Repository. https://doi.org/10.1016/j.sna.2008.12.002
Abstract: A lamellar grating Fourier transform infra-red (FTIR) micro-spectrometer is presented in which the device is electromagnetically actuated in resonant mode so as to achieve larger displacements with a lower driving voltage. By actuating at resonance, we can also have a design with a higher spring stiffness design such that the micro-spectrometer will have little influence from external perturbation. A data acquisition electronic system is designed such that the interferogram of the IR source can still be acquired at a fixed optical path distance (OPD) intervals. This is achieved by using a reference laser source. Working at a resonant frequency of 330 Hz, a 100 μm (bi-directional) displacement is achieved by the device with an input voltage of 2.2 V. A tunable laser source is used to demonstrate the system performance. The peak of the recorded spectra is very close to the actual wavelength of the IR, with a maximum difference of less than 5 nm. © 2008 Elsevier B.V. All rights reserved.
Source Title: Sensors and Actuators, A: Physical
URI: http://scholarbank.nus.edu.sg/handle/10635/54344
ISSN: 09244247
DOI: 10.1016/j.sna.2008.12.002
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