Please use this identifier to cite or link to this item:
https://doi.org/10.1109/LPT.2011.2114877
DC Field | Value | |
---|---|---|
dc.title | A lens holder in conjunction with a MEMS platform for on-chip aligning and fixing of a ball lens in silicon photonics packaging | |
dc.contributor.author | Zhang, Q.X. | |
dc.contributor.author | Du, Y. | |
dc.contributor.author | Tan, C.W. | |
dc.contributor.author | Zhang, J. | |
dc.contributor.author | Yu, M.B. | |
dc.contributor.author | Lo, G.-Q. | |
dc.contributor.author | Kwong, D.-L. | |
dc.date.accessioned | 2014-06-16T09:29:40Z | |
dc.date.available | 2014-06-16T09:29:40Z | |
dc.date.issued | 2011 | |
dc.identifier.citation | Zhang, Q.X., Du, Y., Tan, C.W., Zhang, J., Yu, M.B., Lo, G.-Q., Kwong, D.-L. (2011). A lens holder in conjunction with a MEMS platform for on-chip aligning and fixing of a ball lens in silicon photonics packaging. IEEE Photonics Technology Letters 23 (9) : 588-590. ScholarBank@NUS Repository. https://doi.org/10.1109/LPT.2011.2114877 | |
dc.identifier.issn | 10411135 | |
dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/54301 | |
dc.description.abstract | This letter reports a microelectromechanical system (MEMS) lens holder serving as a key component for on-chip aligning and mechanical fixing of an optical ball lens in silicon photonics packaging. The lens holder, which consists of a suspended mass, is attached onto a previously developed MEMS active alignment platform to achieve precision alignment and fixing of a ball lens with a diameter of 300 μ m in silicon photonics packaging. The operational principles of the system as well as the design, simulation, fabrication process of the lens holder are discussed in detail. © 2006 IEEE. | |
dc.description.uri | http://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1109/LPT.2011.2114877 | |
dc.source | Scopus | |
dc.subject | Active alignment | |
dc.subject | lens holder | |
dc.subject | mechanical locking | |
dc.subject | microelectromechanical system (MEMS) | |
dc.subject | packaging | |
dc.subject | Si-photonics | |
dc.type | Article | |
dc.contributor.department | MECHANICAL ENGINEERING | |
dc.description.doi | 10.1109/LPT.2011.2114877 | |
dc.description.sourcetitle | IEEE Photonics Technology Letters | |
dc.description.volume | 23 | |
dc.description.issue | 9 | |
dc.description.page | 588-590 | |
dc.description.coden | IPTLE | |
dc.identifier.isiut | 000289472600002 | |
Appears in Collections: | Staff Publications |
Show simple item record
Files in This Item:
There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.