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|Title:||A lens holder in conjunction with a MEMS platform for on-chip aligning and fixing of a ball lens in silicon photonics packaging|
microelectromechanical system (MEMS)
|Citation:||Zhang, Q.X., Du, Y., Tan, C.W., Zhang, J., Yu, M.B., Lo, G.-Q., Kwong, D.-L. (2011). A lens holder in conjunction with a MEMS platform for on-chip aligning and fixing of a ball lens in silicon photonics packaging. IEEE Photonics Technology Letters 23 (9) : 588-590. ScholarBank@NUS Repository. https://doi.org/10.1109/LPT.2011.2114877|
|Abstract:||This letter reports a microelectromechanical system (MEMS) lens holder serving as a key component for on-chip aligning and mechanical fixing of an optical ball lens in silicon photonics packaging. The lens holder, which consists of a suspended mass, is attached onto a previously developed MEMS active alignment platform to achieve precision alignment and fixing of a ball lens with a diameter of 300 μ m in silicon photonics packaging. The operational principles of the system as well as the design, simulation, fabrication process of the lens holder are discussed in detail. © 2006 IEEE.|
|Source Title:||IEEE Photonics Technology Letters|
|Appears in Collections:||Staff Publications|
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