Please use this identifier to cite or link to this item: https://doi.org/10.1109/LPT.2011.2114877
Title: A lens holder in conjunction with a MEMS platform for on-chip aligning and fixing of a ball lens in silicon photonics packaging
Authors: Zhang, Q.X.
Du, Y. 
Tan, C.W.
Zhang, J.
Yu, M.B.
Lo, G.-Q.
Kwong, D.-L.
Keywords: Active alignment
lens holder
mechanical locking
microelectromechanical system (MEMS)
packaging
Si-photonics
Issue Date: 2011
Source: Zhang, Q.X., Du, Y., Tan, C.W., Zhang, J., Yu, M.B., Lo, G.-Q., Kwong, D.-L. (2011). A lens holder in conjunction with a MEMS platform for on-chip aligning and fixing of a ball lens in silicon photonics packaging. IEEE Photonics Technology Letters 23 (9) : 588-590. ScholarBank@NUS Repository. https://doi.org/10.1109/LPT.2011.2114877
Abstract: This letter reports a microelectromechanical system (MEMS) lens holder serving as a key component for on-chip aligning and mechanical fixing of an optical ball lens in silicon photonics packaging. The lens holder, which consists of a suspended mass, is attached onto a previously developed MEMS active alignment platform to achieve precision alignment and fixing of a ball lens with a diameter of 300 μ m in silicon photonics packaging. The operational principles of the system as well as the design, simulation, fabrication process of the lens holder are discussed in detail. © 2006 IEEE.
Source Title: IEEE Photonics Technology Letters
URI: http://scholarbank.nus.edu.sg/handle/10635/54301
ISSN: 10411135
DOI: 10.1109/LPT.2011.2114877
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