Please use this identifier to cite or link to this item:
|Title:||A lens holder in conjunction with a MEMS platform for on-chip aligning and fixing of a ball lens in silicon photonics packaging|
microelectromechanical system (MEMS)
|Source:||Zhang, Q.X., Du, Y., Tan, C.W., Zhang, J., Yu, M.B., Lo, G.-Q., Kwong, D.-L. (2011). A lens holder in conjunction with a MEMS platform for on-chip aligning and fixing of a ball lens in silicon photonics packaging. IEEE Photonics Technology Letters 23 (9) : 588-590. ScholarBank@NUS Repository. https://doi.org/10.1109/LPT.2011.2114877|
|Abstract:||This letter reports a microelectromechanical system (MEMS) lens holder serving as a key component for on-chip aligning and mechanical fixing of an optical ball lens in silicon photonics packaging. The lens holder, which consists of a suspended mass, is attached onto a previously developed MEMS active alignment platform to achieve precision alignment and fixing of a ball lens with a diameter of 300 μ m in silicon photonics packaging. The operational principles of the system as well as the design, simulation, fabrication process of the lens holder are discussed in detail. © 2006 IEEE.|
|Source Title:||IEEE Photonics Technology Letters|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
checked on Feb 22, 2018
WEB OF SCIENCETM
checked on Jan 24, 2018
checked on Feb 19, 2018
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.