Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/54215
Title: A genetic optical interferometric inspection on micro-deformation
Authors: Wang, S.H. 
Quan, C. 
Tay, C.J. 
Keywords: Fringe pattern
Interferometry
MEMS
Micro-components
Issue Date: 2004
Source: Wang, S.H.,Quan, C.,Tay, C.J. (2004). A genetic optical interferometric inspection on micro-deformation. Optik 115 (12) : 564-568. ScholarBank@NUS Repository.
Abstract: This paper describes a feasibility study of an optical method for measuring nanoscale deformation of micro-components that are commonly employed in the field of microelectromechanical systems (MEMS). Both theoretical and experimental results demonstrate that an optical interference fringe pattern resulted from an air gap consisting of two surfaces (object and reference surfaces) is a simple function of the deformation of the micro-component. A microscopic system incorporating a coaxial monochromatic light illumination and a high resolution CCD sensor is utilized to record the interference fringe pattern. The experimental results on different micro-components show that the proposed technique is applicable to the deformation measurement on micro-components of MEMS devices.
Source Title: Optik
URI: http://scholarbank.nus.edu.sg/handle/10635/54215
ISSN: 00304026
Appears in Collections:Staff Publications

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