Please use this identifier to cite or link to this item: https://doi.org/10.1109/JSSC.2008.923616
Title: A CMOS readout circuit for SOI resonant accelerometer with 4-μg bias stability and 20-μg/√Hz resolution
Authors: He, L.
Xu, Y.P. 
Palaniapan, M. 
Keywords: Accelerometer
Bias stability
MEMS resonator
Oscillator
Phase noise
Issue Date: Jun-2008
Source: He, L., Xu, Y.P., Palaniapan, M. (2008-06). A CMOS readout circuit for SOI resonant accelerometer with 4-μg bias stability and 20-μg/√Hz resolution. IEEE Journal of Solid-State Circuits 43 (6) : 1480-1490. ScholarBank@NUS Repository. https://doi.org/10.1109/JSSC.2008.923616
Abstract: A fully differential CMOS readout circuit for SOI resonant accelerometer is reported. The readout circuit is essentially an oscillator, consisting of an oscillator and a low noise automatic amplitude control (AAC) loop. A differential sense resonator is proposed to facilitate fully differential circuit topology and improves the SNR under a 3.3-V supply. A second-order AAC loop filter and a novel chopper stabilized rectifier are employed in the AAC loop to remove the noises, in particular, the 1/f noise, and to minimize the phase noise caused by the amplitude stiffening effect. The strong driving feedthrough is avoided by separating the drive and sense operation in the time domain, while using the same electrodes. The complete resonant accelerometer operates under a 3.3-V supply and achieves 140-Hz/g scaling factor, 20 μg/√Hz resolution and 4 μg bias stability. The readout circuit draws 7 mA under 3.3-V supply. © 2008 IEEE.
Source Title: IEEE Journal of Solid-State Circuits
URI: http://scholarbank.nus.edu.sg/handle/10635/53943
ISSN: 00189200
DOI: 10.1109/JSSC.2008.923616
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