Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.sna.2011.04.007
Title: A 21.5 kHz high optical resolution electrostatic double-layered vibratory grating laser scanner
Authors: Du, Y. 
Zhou, G. 
Cheo, K.K.L. 
Zhang, Q.
Feng, H.
Chau, F.S. 
Keywords: Diffraction grating
Micro scanners
Micro-opto- electromechanical systems (MOEMS)
Micro-resonators
Issue Date: 10-Aug-2011
Source: Du, Y., Zhou, G., Cheo, K.K.L., Zhang, Q., Feng, H., Chau, F.S. (2011-08-10). A 21.5 kHz high optical resolution electrostatic double-layered vibratory grating laser scanner. Sensors and Actuators, A: Physical 168 (2) : 253-261. ScholarBank@NUS Repository. https://doi.org/10.1016/j.sna.2011.04.007
Abstract: This article presents a 21.5 kHz high optical resolution electrostatic double-layered vibratory grating laser scanner with an improved grating platform. Detailed optical characterizations of the prototype scanner is measured and reported. The scanner is capable of scanning a laser beam at about 21.5 kHz. The optical resolution of the prototype scanner is measured to be 916 pixels per-unidirectional-scan while scanning in atmosphere. While scanning in vacuum condition, the optical resolution can be estimated to be 1460 pixels per-unidirectional-scan, which is suitable for SXGA (1280 × 1024) resolution scanned beam displays. © 2011 Elsevier B.V. All rights reserved.
Source Title: Sensors and Actuators, A: Physical
URI: http://scholarbank.nus.edu.sg/handle/10635/53883
ISSN: 09244247
DOI: 10.1016/j.sna.2011.04.007
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