Please use this identifier to cite or link to this item:
https://doi.org/10.1109/TAP.2012.2209855
DC Field | Value | |
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dc.title | 135-ghz micromachined on-chip antenna and antenna array | |
dc.contributor.author | Chu, H. | |
dc.contributor.author | Guo, Y.-X. | |
dc.contributor.author | Lim, T.-G. | |
dc.contributor.author | Khoo, Y.M. | |
dc.contributor.author | Shi, X. | |
dc.date.accessioned | 2014-06-16T09:22:37Z | |
dc.date.available | 2014-06-16T09:22:37Z | |
dc.date.issued | 2012 | |
dc.identifier.citation | Chu, H., Guo, Y.-X., Lim, T.-G., Khoo, Y.M., Shi, X. (2012). 135-ghz micromachined on-chip antenna and antenna array. IEEE Transactions on Antennas and Propagation 60 (10) : 4582-4588. ScholarBank@NUS Repository. https://doi.org/10.1109/TAP.2012.2209855 | |
dc.identifier.issn | 0018926X | |
dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/53847 | |
dc.description.abstract | This paper presents the design, fabrication and on-wafer characterization of multi-membrane-supported and polymer-cavity-backed monopole antenna and 2 × 1 patch antenna array operating in the 135-GHz frequency range. The designs were fabricated on two-layer benzocyclobutene (BCB) material membrane obtained by micromachining of the low resistivity silicon. The silicon material is removed underneath the monopole antenna to produce a cavity surrounded by metal and filled with polymer. This polymer filled cavity provides a better support to the membrane than conventional air cavity which is extremely important for practical applications. In the meantime, the higher synthesized effective dielectric permittivity of the BCB-polymer mixed region than BCB-air mixed one provides the possibility for compact antenna array designs. The proposed monopole antenna shows a measured impedance bandwidth from 124 to 136 GHz for S11 less than -10 dB and maximum measured gain of 6.74 dBi at 131 GHz; while the 2 × 1 patch antenna array achieved a measured impedance bandwidth from 126.5 to 138 GHz for S11 less than -10 dB and maximum measured gain of 8.66 dBi at 130 GHz. © 2012 IEEE. | |
dc.description.uri | http://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1109/TAP.2012.2209855 | |
dc.source | Scopus | |
dc.subject | Micromachining | |
dc.subject | on-chip antennas | |
dc.subject | silicon antennas | |
dc.subject | sub-terahertz antennas | |
dc.type | Article | |
dc.contributor.department | ELECTRICAL & COMPUTER ENGINEERING | |
dc.description.doi | 10.1109/TAP.2012.2209855 | |
dc.description.sourcetitle | IEEE Transactions on Antennas and Propagation | |
dc.description.volume | 60 | |
dc.description.issue | 10 | |
dc.description.page | 4582-4588 | |
dc.description.coden | IETPA | |
dc.identifier.isiut | 000309742400014 | |
Appears in Collections: | Staff Publications |
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