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|Title:||135-ghz micromachined on-chip antenna and antenna array|
|Source:||Chu, H., Guo, Y.-X., Lim, T.-G., Khoo, Y.M., Shi, X. (2012). 135-ghz micromachined on-chip antenna and antenna array. IEEE Transactions on Antennas and Propagation 60 (10) : 4582-4588. ScholarBank@NUS Repository. https://doi.org/10.1109/TAP.2012.2209855|
|Abstract:||This paper presents the design, fabrication and on-wafer characterization of multi-membrane-supported and polymer-cavity-backed monopole antenna and 2 × 1 patch antenna array operating in the 135-GHz frequency range. The designs were fabricated on two-layer benzocyclobutene (BCB) material membrane obtained by micromachining of the low resistivity silicon. The silicon material is removed underneath the monopole antenna to produce a cavity surrounded by metal and filled with polymer. This polymer filled cavity provides a better support to the membrane than conventional air cavity which is extremely important for practical applications. In the meantime, the higher synthesized effective dielectric permittivity of the BCB-polymer mixed region than BCB-air mixed one provides the possibility for compact antenna array designs. The proposed monopole antenna shows a measured impedance bandwidth from 124 to 136 GHz for S11 less than -10 dB and maximum measured gain of 6.74 dBi at 131 GHz; while the 2 × 1 patch antenna array achieved a measured impedance bandwidth from 126.5 to 138 GHz for S11 less than -10 dB and maximum measured gain of 8.66 dBi at 130 GHz. © 2012 IEEE.|
|Source Title:||IEEE Transactions on Antennas and Propagation|
|Appears in Collections:||Staff Publications|
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