Please use this identifier to cite or link to this item: https://doi.org/10.1109/TAP.2012.2209855
Title: 135-ghz micromachined on-chip antenna and antenna array
Authors: Chu, H.
Guo, Y.-X. 
Lim, T.-G.
Khoo, Y.M.
Shi, X.
Keywords: Micromachining
on-chip antennas
silicon antennas
sub-terahertz antennas
Issue Date: 2012
Citation: Chu, H., Guo, Y.-X., Lim, T.-G., Khoo, Y.M., Shi, X. (2012). 135-ghz micromachined on-chip antenna and antenna array. IEEE Transactions on Antennas and Propagation 60 (10) : 4582-4588. ScholarBank@NUS Repository. https://doi.org/10.1109/TAP.2012.2209855
Abstract: This paper presents the design, fabrication and on-wafer characterization of multi-membrane-supported and polymer-cavity-backed monopole antenna and 2 × 1 patch antenna array operating in the 135-GHz frequency range. The designs were fabricated on two-layer benzocyclobutene (BCB) material membrane obtained by micromachining of the low resistivity silicon. The silicon material is removed underneath the monopole antenna to produce a cavity surrounded by metal and filled with polymer. This polymer filled cavity provides a better support to the membrane than conventional air cavity which is extremely important for practical applications. In the meantime, the higher synthesized effective dielectric permittivity of the BCB-polymer mixed region than BCB-air mixed one provides the possibility for compact antenna array designs. The proposed monopole antenna shows a measured impedance bandwidth from 124 to 136 GHz for S11 less than -10 dB and maximum measured gain of 6.74 dBi at 131 GHz; while the 2 × 1 patch antenna array achieved a measured impedance bandwidth from 126.5 to 138 GHz for S11 less than -10 dB and maximum measured gain of 8.66 dBi at 130 GHz. © 2012 IEEE.
Source Title: IEEE Transactions on Antennas and Propagation
URI: http://scholarbank.nus.edu.sg/handle/10635/53847
ISSN: 0018926X
DOI: 10.1109/TAP.2012.2209855
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