Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.nimb.2005.06.022
Title: Status of and materials research at SSLS
Authors: Moser, H.O. 
Casse, B.D.F. 
Chew, E.P. 
Cholewa, M. 
Diao, C.Z. 
Ding, S.X.D. 
Kong, J.R. 
Li, Z.W. 
Hua, M. 
Ng, M.L.
Saw, B.T. 
Bin Mahmood, S. 
Vidyaraj, S.V. 
Wilhelmi, O. 
Wong, J.
Yang, P. 
Yu, X.J. 
Gao, X.Y. 
Wee, A.T.S. 
Sim, W.S. 
Lu, D.
Faltermeier, R.B.
Keywords: Dielectric thin films
Microfabrication
Nanoparticles
Surface analysis
Synchrotron light source
Issue Date: Aug-2005
Source: Moser, H.O., Casse, B.D.F., Chew, E.P., Cholewa, M., Diao, C.Z., Ding, S.X.D., Kong, J.R., Li, Z.W., Hua, M., Ng, M.L., Saw, B.T., Bin Mahmood, S., Vidyaraj, S.V., Wilhelmi, O., Wong, J., Yang, P., Yu, X.J., Gao, X.Y., Wee, A.T.S., Sim, W.S., Lu, D., Faltermeier, R.B. (2005-08). Status of and materials research at SSLS. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 238 (1-4) : 83-86. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2005.06.022
Abstract: A short overview is given on the status of SSLS, its four operational and one forthcoming experimental facilities and their use for material science exemplified by selected work on electromagnetic metamaterials, arrays of nanorods for near-IR photonics, thin films of low dielectric constant materials for semiconductor manufacturing, nanoparticles and art objects. © 2005 Elsevier B.V. All rights reserved.
Source Title: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
URI: http://scholarbank.nus.edu.sg/handle/10635/53320
ISSN: 0168583X
DOI: 10.1016/j.nimb.2005.06.022
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