Please use this identifier to cite or link to this item:
https://doi.org/10.1063/1.3086203
DC Field | Value | |
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dc.title | Micro/nanomanufacturing in support of materials science | |
dc.contributor.author | Jian, L.K. | |
dc.contributor.author | Moser, H.O. | |
dc.contributor.author | Chen, A. | |
dc.contributor.author | Heussler, S.P. | |
dc.contributor.author | Liu, G. | |
dc.contributor.author | Bin Mahmood, S. | |
dc.contributor.author | Kalaiselvi, S.M.P. | |
dc.contributor.author | Maniam, S.M. | |
dc.contributor.author | Virasawmy, S. | |
dc.contributor.author | Ren, Y.P. | |
dc.contributor.author | Barrett, M.D. | |
dc.contributor.author | Dhanapaul, A.L. | |
dc.date.accessioned | 2014-05-19T02:56:49Z | |
dc.date.available | 2014-05-19T02:56:49Z | |
dc.date.issued | 2009 | |
dc.identifier.citation | Jian, L.K.,Moser, H.O.,Chen, A.,Heussler, S.P.,Liu, G.,Bin Mahmood, S.,Kalaiselvi, S.M.P.,Maniam, S.M.,Virasawmy, S.,Ren, Y.P.,Barrett, M.D.,Dhanapaul, A.L. (2009). Micro/nanomanufacturing in support of materials science. AIP Conference Proceedings 1092 : 116-119. ScholarBank@NUS Repository. <a href="https://doi.org/10.1063/1.3086203" target="_blank">https://doi.org/10.1063/1.3086203</a> | |
dc.identifier.issn | 0094243X | |
dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/53300 | |
dc.description.abstract | With its LiMiNT facility (Lithography for Micro- and Nanotechnology), Singapore Synchrotron Light Source (SSLS) provides a one-stop shop for micro/nano fabrication on large areas (typically 4" diameter). Synchrotron deep X-ray lithography, eventually enhanced by the super-resolution process, is used to simultaneously pattern large numbers of micro/nano structures into a resist. Laser direct writer or electron beam serve as primary pattern generators, in particular, for mask making. Structure heights of >1mm, aspect ratios of >200, and minimum sizes of <200 nm have been achieved, not necessarily simultaneously. Such structures may be replicated into a variety of metals and plastics. Tilting, rotating of the mask-substrate stack during exposure enables the parallel production of nearly 3D structures. Application fields include electromagnetic metamaterials, X-ray and infrared optics, photonics, lasers, quantum technology, precision manufacturing, and fluidics. SSLS is serving a growing community of users and customers. © 2009 American Institute of Physics. | |
dc.description.uri | http://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1063/1.3086203 | |
dc.source | Scopus | |
dc.subject | Atom trap | |
dc.subject | Metamaterial | |
dc.subject | Micro/nanofabrication | |
dc.subject | Photonic crystal | |
dc.subject | Synchrotron | |
dc.type | Conference Paper | |
dc.contributor.department | SINGAPORE SYNCHROTRON LIGHT SOURCE | |
dc.contributor.department | CENTRE FOR QUANTUM TECHNOLOGIES | |
dc.contributor.department | PHYSICS | |
dc.description.doi | 10.1063/1.3086203 | |
dc.description.sourcetitle | AIP Conference Proceedings | |
dc.description.volume | 1092 | |
dc.description.page | 116-119 | |
dc.identifier.isiut | NOT_IN_WOS | |
Appears in Collections: | Staff Publications |
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