Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.nimb.2005.01.084
Title: A progress review of proton beam writing applications in microphotonics
Authors: Bettiol, A.A. 
Sum, T.C. 
Cheong, F.C. 
Sow, C.H. 
Venugopal Rao, S. 
Van Kan, J.A. 
Teo, E.J. 
Ansari, K. 
Watt, F. 
Keywords: Gratings
Microlens arrays
Photonics
Proton beam writing
Waveguides
Issue Date: Apr-2005
Source: Bettiol, A.A., Sum, T.C., Cheong, F.C., Sow, C.H., Venugopal Rao, S., Van Kan, J.A., Teo, E.J., Ansari, K., Watt, F. (2005-04). A progress review of proton beam writing applications in microphotonics. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 231 (1-4) : 364-371. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2005.01.084
Abstract: The proton beam writing technique is a direct write lithographic technique that is being actively developed at the Centre for Ion Beam Applications, National University of Singapore for microphotonic applications. The technique utilizes a highly focused beam of MeV protons to pattern or modify the refractive index of various materials including polymers, glasses and other inorganic crystals. The technique has been applied to the fabrication of several different types of microoptical components including waveguides, gratings, microlens arrays and colloidal crystal templates. In this paper we give a review of the progress made thus far by our group and other workers in the field of microphotonics using proton beam writing. © 2005 Elsevier B.V. All rights reserved.
Source Title: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
URI: http://scholarbank.nus.edu.sg/handle/10635/53267
ISSN: 0168583X
DOI: 10.1016/j.nimb.2005.01.084
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.

SCOPUSTM   
Citations

52
checked on Dec 13, 2017

WEB OF SCIENCETM
Citations

46
checked on Nov 16, 2017

Page view(s)

54
checked on Dec 9, 2017

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.