Please use this identifier to cite or link to this item:
|Title:||Fabrication of enclosed nanochannels in poly(methylmethacrylate) using proton beam writing and thermal bonding|
|Authors:||Shao, P.E. |
Van Kan, A.
|Source:||Shao, P.E., Van Kan, A., Wang, L.P., Ansari, K., Bettiol, A.A., Watt, F. (2006-02-27). Fabrication of enclosed nanochannels in poly(methylmethacrylate) using proton beam writing and thermal bonding. Applied Physics Letters 88 (9) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.2181631|
|Abstract:||We report a technique for fabricating enclosed nanochannels in poly(methylmethacrylate) (PMMA) using proton beam writing coupled with thermal bonding. Using proton beam writing, straight-walled high-aspect-ratio channels can be directly fabricated through a relatively thick PMMA resist layer spin coated on a Kapton film. By thermally bonding the fabricated structures onto bulk PMMA, peeling off the Kapton substrate, and bonding the remaining exposed side to PMMA, enclosed high-aspect-ratio nano/microchannels can be fabricated. Such enclosed channels can be incorporated into fluidic polymeric devices, and the process is compatible with the fabrication of multilevel three-dimensional fluidic chips with vertical interconnects. © 2006 American Institute of Physics.|
|Source Title:||Applied Physics Letters|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
checked on Feb 15, 2018
WEB OF SCIENCETM
checked on Jan 30, 2018
checked on Feb 19, 2018
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.