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|Title:||Fabrication of enclosed nanochannels in poly(methylmethacrylate) using proton beam writing and thermal bonding|
|Authors:||Shao, P.E. |
Van Kan, A.
|Citation:||Shao, P.E., Van Kan, A., Wang, L.P., Ansari, K., Bettiol, A.A., Watt, F. (2006-02-27). Fabrication of enclosed nanochannels in poly(methylmethacrylate) using proton beam writing and thermal bonding. Applied Physics Letters 88 (9) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.2181631|
|Abstract:||We report a technique for fabricating enclosed nanochannels in poly(methylmethacrylate) (PMMA) using proton beam writing coupled with thermal bonding. Using proton beam writing, straight-walled high-aspect-ratio channels can be directly fabricated through a relatively thick PMMA resist layer spin coated on a Kapton film. By thermally bonding the fabricated structures onto bulk PMMA, peeling off the Kapton substrate, and bonding the remaining exposed side to PMMA, enclosed high-aspect-ratio nano/microchannels can be fabricated. Such enclosed channels can be incorporated into fluidic polymeric devices, and the process is compatible with the fabrication of multilevel three-dimensional fluidic chips with vertical interconnects. © 2006 American Institute of Physics.|
|Source Title:||Applied Physics Letters|
|Appears in Collections:||Staff Publications|
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