Please use this identifier to cite or link to this item: https://doi.org/10.1063/1.2181631
Title: Fabrication of enclosed nanochannels in poly(methylmethacrylate) using proton beam writing and thermal bonding
Authors: Shao, P.E. 
Van Kan, A. 
Wang, L.P.
Ansari, K. 
Bettiol, A.A. 
Watt, F. 
Issue Date: 27-Feb-2006
Source: Shao, P.E.,Van Kan, A.,Wang, L.P.,Ansari, K.,Bettiol, A.A.,Watt, F. (2006-02-27). Fabrication of enclosed nanochannels in poly(methylmethacrylate) using proton beam writing and thermal bonding. Applied Physics Letters 88 (9) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.2181631
Abstract: We report a technique for fabricating enclosed nanochannels in poly(methylmethacrylate) (PMMA) using proton beam writing coupled with thermal bonding. Using proton beam writing, straight-walled high-aspect-ratio channels can be directly fabricated through a relatively thick PMMA resist layer spin coated on a Kapton film. By thermally bonding the fabricated structures onto bulk PMMA, peeling off the Kapton substrate, and bonding the remaining exposed side to PMMA, enclosed high-aspect-ratio nano/microchannels can be fabricated. Such enclosed channels can be incorporated into fluidic polymeric devices, and the process is compatible with the fabrication of multilevel three-dimensional fluidic chips with vertical interconnects. © 2006 American Institute of Physics.
Source Title: Applied Physics Letters
URI: http://scholarbank.nus.edu.sg/handle/10635/52931
ISSN: 00036951
DOI: 10.1063/1.2181631
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