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Title: Deuterium-oxygen exchange on diamond (100)-A study by ERDA, RBS and TOF-SIMS
Authors: Loh, K.P. 
Xie, X.N. 
Zhang, X. 
Teo, E.J. 
Osipowicz, T. 
Lai, M.Y.
Yakovlev, N.
Keywords: Atomic oxygen
Rutherford backscattering
Time-of-flight secondary ion mass spectrometry
Issue Date: Jul-2002
Source: Loh, K.P., Xie, X.N., Zhang, X., Teo, E.J., Osipowicz, T., Lai, M.Y., Yakovlev, N. (2002-07). Deuterium-oxygen exchange on diamond (100)-A study by ERDA, RBS and TOF-SIMS. Diamond and Related Materials 11 (7) : 1385-1390. ScholarBank@NUS Repository.
Abstract: The exchange of radio-frequency plasma-excited atomic O with chemisorbed D, and vice versa, on single crystalline diamond (100) 2 × 1 has been investigated by elastic recoil detection analysis (ERDA), Rutherford backscattering spectrometry (RBS) and time-of-flight secondary ion mass spectrometry (TOF-SIMS). It was found that the O-D, as well as D-O, exchange processes were thermally activated by the diamond substrate. The surface D was only partially exchanged by atomic O at room temperature. At elevated temperatures, the replacement of D by O was greatly enhanced, with 80% substitution by O at 300°C. It was also observed that the uptake of O proceeded more readily on the pre-deuterated surface compared to the clean surface. Ultra-shallow depth profiling revealed that atomic beam treatment of single crystalline samples at 800°C resulted in only superficial uptake of D and O, with no surface incorporation within the shallow analysis depth. The replacement of pre-adsorbed O by RF-excited atomic D was also studied by TOF-SIMS. Pre-adsorbed O was relatively stable and resisted removal at 300°C. D dosed onto the oxygenated surface was found to co-adsorb with O, possibly as surface bound OD species. Mechanisms for the O-D and D-O exchange processes were discussed in connection with the atomic structure of the C(100) surface. © 2002 Elsevier Science B.V. All rights reserved.
Source Title: Diamond and Related Materials
ISSN: 09259635
DOI: 10.1016/S0925-9635(02)00015-8
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