Please use this identifier to cite or link to this item: https://doi.org/10.1002/adma.200305185
Title: Nanoporous Ultra-Low-κ Films Prepared from Fluorinated Polyimide with Grafted Poly(acrylic acid) Side Chains
Authors: Wang, W.-C.
Vora, R.H. 
Kang, E.-T. 
Neoh, K.-G. 
Ong, C.-K. 
Chen, L.-F. 
Issue Date: 5-Jan-2004
Source: Wang, W.-C., Vora, R.H., Kang, E.-T., Neoh, K.-G., Ong, C.-K., Chen, L.-F. (2004-01-05). Nanoporous Ultra-Low-κ Films Prepared from Fluorinated Polyimide with Grafted Poly(acrylic acid) Side Chains. Advanced Materials 16 (1) : 54-57. ScholarBank@NUS Repository. https://doi.org/10.1002/adma.200305185
Abstract: Thermal decomposition of the fluorinated polyimide with grafted poly(acrylic acid) side chain was discussed. Thermal stability, low moisture absorption and good adhesion to semiconductors and metals were also studied. Density measurements were also used to characterize the porosity of the films. It was found that the dielectric constant of the nanoporous FPI films can be varied by varying the grafted concentration of the labile side chains.
Source Title: Advanced Materials
URI: http://scholarbank.nus.edu.sg/handle/10635/51796
ISSN: 09359648
DOI: 10.1002/adma.200305185
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