Please use this identifier to cite or link to this item: https://doi.org/8/085007
Title: Scanning grating based in-plane movement sensing
Authors: Yu, H. 
Zhou, G. 
Kumar Sinha, S. 
Chau, F.S. 
Issue Date: Aug-2010
Source: Yu, H.,Zhou, G.,Kumar Sinha, S.,Chau, F.S. (2010-08). Scanning grating based in-plane movement sensing. Journal of Micromechanics and Microengineering 20 (8) : -. ScholarBank@NUS Repository. https://doi.org/8/085007
Abstract: A novel method for detecting the in-plane movement of MEMS devices has been presented, in which a scanning grating structure has been adopted. One end of the grating is directly connected to the movable platform under test, while the other end is fixed to a substrate, both by a suspending beam. Due to this structure design, any in-plane movement of the platform will be finally translated into grating rotation. When a laser beam is incident onto the grating, the direction of diffracted light as well as its spot position on a photosensitive device (PSD) will be changed accordingly due to the grating rotation. From the output of the PSD, the movement amplitude can be finally determined. With this novel sensing mechanism, not only static and dynamic movements, but also the transient structure response have been experimentally demonstrated. © 2010 IOP Publishing Ltd.
Source Title: Journal of Micromechanics and Microengineering
URI: http://scholarbank.nus.edu.sg/handle/10635/51520
ISSN: 09601317
DOI: 8/085007
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