Please use this identifier to cite or link to this item: https://doi.org/10.1063/1.2374809
Title: Microlens array fabrication by laser interference lithography for super-resolution surface nanopatterning
Authors: Lim, C.S. 
Hong, M.H.
Lin, Y. 
Xie, Q.
Luk'Yanchuk, B.S.
Senthil Kumar, A. 
Rahman, M. 
Issue Date: 2006
Source: Lim, C.S., Hong, M.H., Lin, Y., Xie, Q., Luk'Yanchuk, B.S., Senthil Kumar, A., Rahman, M. (2006). Microlens array fabrication by laser interference lithography for super-resolution surface nanopatterning. Applied Physics Letters 89 (19) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.2374809
Abstract: A technique for large area and fast speed surface nanopatterning of photopolymer surface with laser irradiation through microlens array (MLA) was demonstrated. The laser beam was split into many focused tiny light spots by a 1 μm diameter MLA fabricated by laser interference lithography followed by reflow and reactive ion etching. The fabricated MLA exhibits excellent uniformity and surface quality. Up to 6 250 000 nanopatterns can be fabricated over an area of 5×5 mm2 under KrF excimer laser single pulse exposure. A spot size down to 78 nm was obtained corresponding to super-resolution of λ3, λ is the incident laser wavelength. © 2006 American Institute of Physics.
Source Title: Applied Physics Letters
URI: http://scholarbank.nus.edu.sg/handle/10635/51454
ISSN: 00036951
DOI: 10.1063/1.2374809
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.

SCOPUSTM   
Citations

49
checked on Dec 13, 2017

WEB OF SCIENCETM
Citations

47
checked on Nov 15, 2017

Page view(s)

43
checked on Dec 16, 2017

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.