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Please use this identifier to cite or link to this item: https://scholarbank.nus.edu.sg/handle/10635/51263
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dc.titleTheoretical model of a three plates capacitive pressure sensor
dc.contributor.authorGe, P.
dc.contributor.authorTan, W.W.
dc.contributor.authorTay, F.
dc.date.accessioned2014-04-24T08:38:03Z
dc.date.available2014-04-24T08:38:03Z
dc.date.issued2005
dc.identifier.citationGe, P.,Tan, W.W.,Tay, F. (2005). Theoretical model of a three plates capacitive pressure sensor. Conference Record - IEEE Instrumentation and Measurement Technology Conference 1 : 214-219. ScholarBank@NUS Repository.
dc.identifier.isbn0780388798
dc.identifier.issn10915281
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/51263
dc.description.abstractIn the design of micro pressure sensors, the deflections of diaphragms are. crucial to conduct performance simulations. This paper discuss two cases of diaphragm deformation in a three plates capacitive pressure sensor: a clamped edge diaphragm under uniform load and a cantilever plate deflects in touch mode operation. Analytical models are proposed to provide a quick estimation of the sensors. Evaluation of these models have been done by comparing the results to that of the finite-element method (FEM). © 2005 IEEE.
dc.sourceScopus
dc.subjectDiaphragm deformation
dc.subjectFEM
dc.subjectPressure sensor
dc.subjectSimulation
dc.typeConference Paper
dc.contributor.departmentMECHANICAL ENGINEERING
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.description.sourcetitleConference Record - IEEE Instrumentation and Measurement Technology Conference
dc.description.volume1
dc.description.page214-219
dc.description.codenCRIIE
dc.identifier.isiutNOT_IN_WOS
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