Please use this identifier to cite or link to this item:
|Title:||Theoretical model of a three plates capacitive pressure sensor|
|Source:||Ge, P.,Tan, W.W.,Tay, F. (2005). Theoretical model of a three plates capacitive pressure sensor. Conference Record - IEEE Instrumentation and Measurement Technology Conference 1 : 214-219. ScholarBank@NUS Repository.|
|Abstract:||In the design of micro pressure sensors, the deflections of diaphragms are. crucial to conduct performance simulations. This paper discuss two cases of diaphragm deformation in a three plates capacitive pressure sensor: a clamped edge diaphragm under uniform load and a cantilever plate deflects in touch mode operation. Analytical models are proposed to provide a quick estimation of the sensors. Evaluation of these models have been done by comparing the results to that of the finite-element method (FEM). © 2005 IEEE.|
|Source Title:||Conference Record - IEEE Instrumentation and Measurement Technology Conference|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
checked on Jan 19, 2018
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.