Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/51263
Title: Theoretical model of a three plates capacitive pressure sensor
Authors: Ge, P.
Tan, W.W. 
Tay, F. 
Keywords: Diaphragm deformation
FEM
Pressure sensor
Simulation
Issue Date: 2005
Source: Ge, P.,Tan, W.W.,Tay, F. (2005). Theoretical model of a three plates capacitive pressure sensor. Conference Record - IEEE Instrumentation and Measurement Technology Conference 1 : 214-219. ScholarBank@NUS Repository.
Abstract: In the design of micro pressure sensors, the deflections of diaphragms are. crucial to conduct performance simulations. This paper discuss two cases of diaphragm deformation in a three plates capacitive pressure sensor: a clamped edge diaphragm under uniform load and a cantilever plate deflects in touch mode operation. Analytical models are proposed to provide a quick estimation of the sensors. Evaluation of these models have been done by comparing the results to that of the finite-element method (FEM). © 2005 IEEE.
Source Title: Conference Record - IEEE Instrumentation and Measurement Technology Conference
URI: http://scholarbank.nus.edu.sg/handle/10635/51263
ISBN: 0780388798
ISSN: 10915281
Appears in Collections:Staff Publications

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