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| Title: | Theoretical model of a three plates capacitive pressure sensor | Authors: | Ge, P. Tan, W.W. Tay, F. |
Keywords: | Diaphragm deformation FEM Pressure sensor Simulation |
Issue Date: | 2005 | Citation: | Ge, P.,Tan, W.W.,Tay, F. (2005). Theoretical model of a three plates capacitive pressure sensor. Conference Record - IEEE Instrumentation and Measurement Technology Conference 1 : 214-219. ScholarBank@NUS Repository. | Abstract: | In the design of micro pressure sensors, the deflections of diaphragms are. crucial to conduct performance simulations. This paper discuss two cases of diaphragm deformation in a three plates capacitive pressure sensor: a clamped edge diaphragm under uniform load and a cantilever plate deflects in touch mode operation. Analytical models are proposed to provide a quick estimation of the sensors. Evaluation of these models have been done by comparing the results to that of the finite-element method (FEM). © 2005 IEEE. | Source Title: | Conference Record - IEEE Instrumentation and Measurement Technology Conference | URI: | http://scholarbank.nus.edu.sg/handle/10635/51263 | ISBN: | 0780388798 | ISSN: | 10915281 |
| Appears in Collections: | Staff Publications |
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