Please use this identifier to cite or link to this item: https://doi.org/10.1142/S0218625X10011085
Title: Large area parallel surface nanostructuring with laser irradiation through microlens arrays
Authors: Lim, C.S. 
Hong, M.H. 
Lin, Y. 
Tan, L.S. 
Kumar, A.S. 
Rahman, M. 
Keywords: Microlens arrays
nanopatterning
Issue Date: Jun-2010
Source: Lim, C.S., Hong, M.H., Lin, Y., Tan, L.S., Kumar, A.S., Rahman, M. (2010-06). Large area parallel surface nanostructuring with laser irradiation through microlens arrays. Surface Review and Letters 17 (3) : 383-387. ScholarBank@NUS Repository. https://doi.org/10.1142/S0218625X10011085
Abstract: In the past decade, the development of nanoelectronics and nano-optics has attracted much interest in surface nanostructuring of semiconductor materials. The irradiation of a microlens array by a laser beam generates many focused light spots, which can act as a direct writing tool on photo-polymer materials. This maskless surface nanostructuring technique enables thousands to millions of identical nano-features to be patterned in a couple of laser pulses. Scanning electron microscopy (SEM) and atomic force microscopy (AFM) images show that nano-features were patterned uniformly on the substrate surface, which suggests a versatile way of parallel surface nanostructuring over a large area. The simulation results of the energy flux distribution at the focal plane of the microlens arrays will also be discussed. © 2010 World Scientific Publishing Company.
Source Title: Surface Review and Letters
URI: http://scholarbank.nus.edu.sg/handle/10635/50964
ISSN: 0218625X
DOI: 10.1142/S0218625X10011085
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