Please use this identifier to cite or link to this item:
|Title:||Large area parallel surface nanostructuring with laser irradiation through microlens arrays|
|Authors:||Lim, C.S. |
|Citation:||Lim, C.S., Hong, M.H., Lin, Y., Tan, L.S., Kumar, A.S., Rahman, M. (2010-06). Large area parallel surface nanostructuring with laser irradiation through microlens arrays. Surface Review and Letters 17 (3) : 383-387. ScholarBank@NUS Repository. https://doi.org/10.1142/S0218625X10011085|
|Abstract:||In the past decade, the development of nanoelectronics and nano-optics has attracted much interest in surface nanostructuring of semiconductor materials. The irradiation of a microlens array by a laser beam generates many focused light spots, which can act as a direct writing tool on photo-polymer materials. This maskless surface nanostructuring technique enables thousands to millions of identical nano-features to be patterned in a couple of laser pulses. Scanning electron microscopy (SEM) and atomic force microscopy (AFM) images show that nano-features were patterned uniformly on the substrate surface, which suggests a versatile way of parallel surface nanostructuring over a large area. The simulation results of the energy flux distribution at the focal plane of the microlens arrays will also be discussed. © 2010 World Scientific Publishing Company.|
|Source Title:||Surface Review and Letters|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
WEB OF SCIENCETM
checked on Feb 20, 2019
checked on Jan 26, 2019
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.