Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.ijmachtools.2005.06.004
Title: Fabrication of concave micro lens array using laser patterning and isotropic etching
Authors: Lim, C.S. 
Hong, M.H. 
Kumar, A.S. 
Rahman, M. 
Liu, X.D.
Keywords: Isotropic etching
Laser patterning
Lens sag
Micro lens arrays
Issue Date: Apr-2006
Source: Lim, C.S., Hong, M.H., Kumar, A.S., Rahman, M., Liu, X.D. (2006-04). Fabrication of concave micro lens array using laser patterning and isotropic etching. International Journal of Machine Tools and Manufacture 46 (5) : 552-558. ScholarBank@NUS Repository. https://doi.org/10.1016/j.ijmachtools.2005.06.004
Abstract: Micro lens arrays are widely used in optical communication and laser-fiber coupling applications. In this paper, a technique to fabricate concave micro lens arrays on glass substrate using a third harmonic Nd:YAG laser direct patterning and followed by chemical wet isotropic etching is presented. The patterning process was done on gold film, which was coated on a glass substrate by using a NC controlled laser ablation tool paths. The glass substrate is then etched by using hydrofluoric acid (HF) solutions whereby the exposed area will be dissolved away by chemical reaction with HF. The type of etching process is an isotropic etching which the etching rate is equal at all direction thus produce hemispherical concave profile on glass. The optimum laser patterning parameters is obtained and the effect of different types of HF solutions on etching efficiency is studied. The surface morphology, 2D and 3D profiles are also measured. Various micro lens diameters are fabricated with different values of lens sag.
Source Title: International Journal of Machine Tools and Manufacture
URI: http://scholarbank.nus.edu.sg/handle/10635/50920
ISSN: 08906955
DOI: 10.1016/j.ijmachtools.2005.06.004
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