Please use this identifier to cite or link to this item: https://doi.org/10.1117/12.462859
Title: A 2f method for the measurement of resonant frequency and Q-factor of micromechanical transducers
Authors: Logeeswaran, V.J. 
Tay, F.E.H. 
Chan, M.L.
Chau, F.S. 
Liang, Y.C. 
Keywords: Electrostatic drive
First harmonic (2f)
Lock-in
Lorentzian curve-fitting
Resonance Curve Area (RCA)
Issue Date: 2002
Source: Logeeswaran, V.J., Tay, F.E.H., Chan, M.L., Chau, F.S., Liang, Y.C. (2002). A 2f method for the measurement of resonant frequency and Q-factor of micromechanical transducers. Proceedings of SPIE - The International Society for Optical Engineering 4755 : 584-593. ScholarBank@NUS Repository. https://doi.org/10.1117/12.462859
Abstract: In this paper, the response to the first harmonic component (2f) of the electrostatic force in single terminal driven electrostatic comb-drive and parallel-plate drive was used as a signal to extract device parameters, namely, the Q-factor and resonant frequency instead of the fundamental (1f) resonance response. It is shown that the difficulty in motional measurement due to electrical cross-talk (parasitics) using 1f measurement can be overcome with a higher signal-tonoise ratio of the 2f signal. Both atmospheric (low-Q) and reduced pressure environment were investigated using offchip electronics and lock-in amplifier. The measurements were done on the electrostatic comb-drive and capacitive parallel plate sensing plates that form the two core modules of a yaw rate sensor (dual-axis resonator). The effects of AC and DC bias voltages on the measured response have been investigated. Experimental amplitude and phase response data have been analysed using the Lorentzian curve-fit, Resonance Curve Area (RCA) method, the half-power bandwidth method (3dB) and the Nyquist plot for data fitting and determination of the Q-factor and resonance frequency.
Source Title: Proceedings of SPIE - The International Society for Optical Engineering
URI: http://scholarbank.nus.edu.sg/handle/10635/50836
ISSN: 0277786X
DOI: 10.1117/12.462859
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.

SCOPUSTM   
Citations

1
checked on Dec 13, 2017

Page view(s)

54
checked on Dec 9, 2017

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.