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|Title:||A 2f method for the measurement of resonant frequency and Q-factor of micromechanical transducers|
|Authors:||Logeeswaran, V.J. |
First harmonic (2f)
Resonance Curve Area (RCA)
|Source:||Logeeswaran, V.J., Tay, F.E.H., Chan, M.L., Chau, F.S., Liang, Y.C. (2002). A 2f method for the measurement of resonant frequency and Q-factor of micromechanical transducers. Proceedings of SPIE - The International Society for Optical Engineering 4755 : 584-593. ScholarBank@NUS Repository. https://doi.org/10.1117/12.462859|
|Abstract:||In this paper, the response to the first harmonic component (2f) of the electrostatic force in single terminal driven electrostatic comb-drive and parallel-plate drive was used as a signal to extract device parameters, namely, the Q-factor and resonant frequency instead of the fundamental (1f) resonance response. It is shown that the difficulty in motional measurement due to electrical cross-talk (parasitics) using 1f measurement can be overcome with a higher signal-tonoise ratio of the 2f signal. Both atmospheric (low-Q) and reduced pressure environment were investigated using offchip electronics and lock-in amplifier. The measurements were done on the electrostatic comb-drive and capacitive parallel plate sensing plates that form the two core modules of a yaw rate sensor (dual-axis resonator). The effects of AC and DC bias voltages on the measured response have been investigated. Experimental amplitude and phase response data have been analysed using the Lorentzian curve-fit, Resonance Curve Area (RCA) method, the half-power bandwidth method (3dB) and the Nyquist plot for data fitting and determination of the Q-factor and resonance frequency.|
|Source Title:||Proceedings of SPIE - The International Society for Optical Engineering|
|Appears in Collections:||Staff Publications|
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