Please use this identifier to cite or link to this item: https://doi.org/10.1117/1.1626126
Title: Resolution analysis of atomic force microscopy using temporal phase modulation interferometry
Authors: Ng, T.W. 
Sasaki, O.
Chua, H.T. 
Keywords: Atomic force
Interferometry
Microscopy
Phase modulation
Scanning probe
Issue Date: Jan-2004
Citation: Ng, T.W., Sasaki, O., Chua, H.T. (2004-01). Resolution analysis of atomic force microscopy using temporal phase modulation interferometry. Optical Engineering 43 (1) : 75-78. ScholarBank@NUS Repository. https://doi.org/10.1117/1.1626126
Abstract: The temporal phase modulation class of interferometers is known to be able to provide high-accuracy measurements of displacement. The resolution of this class of interferometers is studied in relation to its application in atomic force microscopy under the static deflection mode. Interferometric sensing is advantageous if atomic force microscopy is implemented for array cantilevers. The sources of error are assumed to be either additive (due to noise in photodetection and in the electrical circuitry) or multiplicative (due to ambient effects). We reveal that minimum detectable displacements in the 0.1-nm range are possible under very careful design and measuring conditions. © 2004 Society of Photo-Optical Instrumentation Engineers.
Source Title: Optical Engineering
URI: http://scholarbank.nus.edu.sg/handle/10635/50372
ISSN: 00913286
DOI: 10.1117/1.1626126
Appears in Collections:Staff Publications

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