MICROFABRICATION OF MEMS AND AFM PLATFORMS FOR LUBRICATION STUDY

Abstract

Microfabrication and the use of micro-electromechanical (MEMS) structures to address friction problems is the theme of this thesis. To this end, MEMS structures called ¿sleds¿ are introduced.

Sleds are microfabricated silicon plates with three sharp tips protruded from the plate and these form a 3-point contact when the sled is placed on a surface. The objective is to make sleds move in-plane across a surface with user-controlled friction based on the idea of actuated superlubricity (A. Socoliuc, et. al. Science 313, 207-210 (2006)).

Ultrasonic actuation was successful and results show the sled movement controlled by changing the actuation frequencies. The vibration modes are measured experimentally using a laser vibrometer and qualitatively match the FEM modelling. A new AFM based approach is also presented for measuring the friction of free standing MEMS structures.

Special MEMS cantilevers are also microfabricated for low friction force measurement and friction study in liquid.