Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.jmatprotec.2007.04.098
Title: Micro-mould fabrication for a micro-gear via vacuum casting
Authors: Tang, Y. 
Tan, W.K. 
Fuh, J.Y.H. 
Loh, H.T. 
Wong, Y.S. 
Thian, S.C.H. 
Lu, L. 
Keywords: Micro-fabrication
Micro-mould
Photolithography
Vacuum casting
Issue Date: 2007
Source: Tang, Y., Tan, W.K., Fuh, J.Y.H., Loh, H.T., Wong, Y.S., Thian, S.C.H., Lu, L. (2007). Micro-mould fabrication for a micro-gear via vacuum casting. Journal of Materials Processing Technology 192-193 : 334-339. ScholarBank@NUS Repository. https://doi.org/10.1016/j.jmatprotec.2007.04.098
Abstract: A micro-mould fabrication method based on vacuum casting was developed and its functionality and reproducibility were demonstrated. The micro-components used in this study were SU-8 photoresist micro-gears fabricated by UV photolithography. These micro-gears served as the master patterns from which silicone rubber micro-mould cavities were fabricated with the use of the vacuum casting technology. The process parameters that had an influence on the quality of the micro-mould cavities were identified and optimised. Using the optimised process parameters resulted in high fidelity silicone rubber micro-mould cavities at high resolutions. Dimensional analysis was carried out using white light interferometry. It was found that all the micro-gear cavities in the micro-moulds were dimensionally accurate and consistent to the master gear, with a dimension deviation less than 3% of the respective dimensions. Micro-casting was also carried out using the silicone rubber moulds. Micro-gears were successfully transferred from the silicone rubber moulds into PU resin and wax pieces under vacuum conditions, thereby demonstrating that the micro-mould fabricated was capable of producing functional micro-parts that were able to replicate micro-features. © 2007.
Source Title: Journal of Materials Processing Technology
URI: http://scholarbank.nus.edu.sg/handle/10635/42994
ISSN: 09240136
DOI: 10.1016/j.jmatprotec.2007.04.098
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