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https://scholarbank.nus.edu.sg/handle/10635/34888
| Title: | Method for modulating the effective work function | Authors: | PANTISANO LUIGI SCHRAM TOM DE GENDT STEFAN |
Issue Date: | 5-Dec-2007 | Citation: | PANTISANO LUIGI,SCHRAM TOM,DE GENDT STEFAN (2007-12-05). Method for modulating the effective work function. ScholarBank@NUS Repository. | Abstract: | A new MOSFET device is described comprising a metal gate electrode, a gate dielectric and an interfacial layer. A method for its manufacture is also provided and its applications. | URI: | http://scholarbank.nus.edu.sg/handle/10635/34888 |
| Appears in Collections: | Staff Publications |
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| File | Description | Size | Format | Access Settings | Version | |
|---|---|---|---|---|---|---|
| EP1863072A1.pdf | 842.06 kB | Adobe PDF | OPEN | Published | View/Download |
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