Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/34888
Title: Method for modulating the effective work function
Authors: PANTISANO LUIGI
SCHRAM TOM
DE GENDT STEFAN
Issue Date: 5-Dec-2007
Source: PANTISANO LUIGI,SCHRAM TOM,DE GENDT STEFAN (2007-12-05). Method for modulating the effective work function. ScholarBank@NUS Repository.
Abstract: A new MOSFET device is described comprising a metal gate electrode, a gate dielectric and an interfacial layer. A method for its manufacture is also provided and its applications.
URI: http://scholarbank.nus.edu.sg/handle/10635/34888
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