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Title: Silicon-micromachined Vibratory Diffraction Gratings for Miniaturized High-resolution Rapid Laser Scanning
Authors: DU YU
Keywords: Laser scanner; diffraction grating; Microelectromechanical Systems(MEMS)
Issue Date: 14-Feb-2012
Source: DU YU (2012-02-14). Silicon-micromachined Vibratory Diffraction Gratings for Miniaturized High-resolution Rapid Laser Scanning. ScholarBank@NUS Repository.
Abstract: Scanned beam technology is highly desired in numerous display and imaging applications. A high quality display or imaging system based on scanned beam technology requires laser scanners with large aperture size, large optical scan angle and high scanning frequency. Microelectromechanical systems (MEMS) technology based micromirror laser scanners enabled the possibility of high frequency operations but its optical performance will degrade during high speed scanning due to non-rigid body dynamic deformation. An alternative laser scanning scheme, which utilize in-plane rotation of a diffraction grating rather than out-of-plane deflection of a reflective surface, is then proposed to overcome the performance limitation of the micromirror laser scanner at high frequency region. This dissertation presents the working principle, design, modeling, fabrication and characterization of several novel MEMS vibratory grating laser scanners for high speed scanned beam display and imaging applications.
Appears in Collections:Ph.D Theses (Open)

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