Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/32706
Title: Rotational stage for high speed, large area scanning in focused beam systems
Authors: LIU, YONG YU 
CHAN, DANIEL S. H. 
PHANG, JACOB C. H. 
Issue Date: 28-Jun-2005
Source: LIU, YONG YU,CHAN, DANIEL S. H.,PHANG, JACOB C. H. (2005-06-28). Rotational stage for high speed, large area scanning in focused beam systems. ScholarBank@NUS Repository.
Abstract: A mechanical scanning stage for high speed image acquisition in a focused beam system. The mechanical scanning stage preferably is a combination of four stages. A first stage provides linear motion. A second stage, above the first stage, provides rotational positioning. A third stage above the rotational stage is moveable in a first linear direction, and the fourth stage above the third stage is positionable in a second linear direction orthogonal to the first direction. The four stages are responsive to input from a controller programmed with a polar coordinate pixel addressing method, for positioning a specimen mounted on the mechanical stage to allow an applied static focus beam to irradiate selected areas of interest, thereby imaged by collecting signals from the specimen using a polar coordinate pixel addressing method.
URI: http://scholarbank.nus.edu.sg/handle/10635/32706
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