Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/32667
Title: Process to fabricate an integrated micro-fluidic system on a single wafer
Authors: ZOU, QUANBO
CHEN, YU
SINGH, JANAK
LIM, TIT MENG 
YAN, TIE 
HENG, CHEW KIAT 
Issue Date: 6-Apr-2004
Source: ZOU, QUANBO,CHEN, YU,SINGH, JANAK,LIM, TIT MENG,YAN, TIE,HENG, CHEW KIAT (2004-04-06). Process to fabricate an integrated micro-fluidic system on a single wafer. ScholarBank@NUS Repository.
Abstract: Formation of micro-fluidic systems is normally achieved using a multi-wafer fabrication procedure. The present invention teaches how a complete micro-fluidic system can be implemented on a single chip. The invention uses only dry etch processes to form micro-chambers. In particular, it makes use of deep reactive ion etching whereby multiple trenches of differing depths may be formed simultaneously. Buried micro-chambers are formed by isotropically increasing trench widths using an etchant that does not attack the mask so the trenches grow wider beneath the surface until they merge. Deposition of a dielectric layer over the trenches allows some trenches to be sealed and some to be left open. Micro-pumps are formed by including in the micro-chamber roof a layer that is used to change chamber volume either through electrostatically induced motion or through thermal mismatch as a result of its being heated.
URI: http://scholarbank.nus.edu.sg/handle/10635/32667
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