Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/32540
Title: Method and apparatus for measuring quantitative voltage contrast
Authors: CHIM, WAI K. 
PHANG, JACOB C. H. 
CHAN, DANIEL S. H. 
Issue Date: 23-Jan-1996
Source: CHIM, WAI K.,PHANG, JACOB C. H.,CHAN, DANIEL S. H. (1996-01-23). Method and apparatus for measuring quantitative voltage contrast. ScholarBank@NUS Repository.
Abstract: In a method and apparatus for measuring quantitative voltage contrast, an electron beam of the scanning electron microscope is located on a specimen electrode, and a grid voltage of an energy analyzer of the scanning electron microscope is varied. A detector detects secondary electron emission from the specimen electrode. A measured peak voltage of the specimen electrode is determined based on output from the detector. A specimen electrode voltage corrected for type I local field effect error is then obtained using the measured peak voltage and a type I calibration curve. The type I calibration curve represents peak voltage versus specimen electrode voltage. Type II local field effect error in the specimen electrode voltage is then corrected based on a type II calibration curve. The type II calibration curve represents a shift in specimen electrode peak voltage versus adjacent electrode voltage.
URI: http://scholarbank.nus.edu.sg/handle/10635/32540
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
File Description SizeFormatAccess SettingsVersion 
US5486769.PDF532.81 kBAdobe PDF

OPEN

PublishedView/Download

Page view(s)

137
checked on Dec 8, 2017

Download(s)

106
checked on Dec 8, 2017

Google ScholarTM

Check


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.