Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/27678
Title: Surface modification of SiLK-R by graft copolymerization of 4-vinylpyridine for adhesion enhancement and reduction of copper diffusion
Authors: ZHU YEQING
Keywords: SiLK, 4-vinylpyridine, adhesion, diffusion, grafting, copper
Issue Date: 30-Sep-2004
Source: ZHU YEQING (2004-09-30). Surface modification of SiLK-R by graft copolymerization of 4-vinylpyridine for adhesion enhancement and reduction of copper diffusion. ScholarBank@NUS Repository.
Abstract: Copper and low-ki?<dielectric polymer is replacing conventional aluminium and oxide dielectrics to reduce the resistance and capacitance delay. Problems arise such as poor adhesion and high diffusivity of copper into substrate. Molecular redesign and functionalization via graft polymerization have shown to be an effective way to address these problems. Surface modifications of SiLKA? via UV-induced and plasma-induced graft copolymerization of 4-vinylpyrindine (4VP) were performed. Copper vapor deposition and electroless metallization were carried out, followed by thermal annealing. Metrology tools, such as XPS, AFM and FTIR, were used to investigate the copolymer composition, suface topography and functional groups in the copolymer. 180o-peel off adhesion strength of copper to polymer substrate was measured. ToF-SIMS, RBS and TEM were employed to evaluate the copper diffusion into SiLK. The graft copolyermized 4VP layer on the dense and porous Si-SiLK surface served effectively as (i) a sensitization layer for the electroless plating of copper, (ii) an adhesion promotion layer for the deposited copper, and (iii) a diffusion barrier for the deposited copper. These functionalities arose from the strong interactions of the copper ions and atoms with pyridine group of the graft copolymerized 4VP layer.
URI: http://scholarbank.nus.edu.sg/handle/10635/27678
Appears in Collections:Master's Theses (Open)

Show full item record
Files in This Item:
File Description SizeFormatAccess SettingsVersion 
01.Title Page.pdf24.5 kBAdobe PDF

OPEN

NoneView/Download
02.Introductory Section.pdf101.51 kBAdobe PDF

OPEN

NoneView/Download
03.Chapter 1 Introduction.pdf36.12 kBAdobe PDF

OPEN

NoneView/Download
04.Chapter2 LiteratureReview.pdf61.39 kBAdobe PDF

OPEN

NoneView/Download
05.Chapter3 SurfaceModificationgrafting.pdf308.12 kBAdobe PDF

OPEN

NoneView/Download
06.Chapter4 Plasmagraftcopolymerization.pdf515.17 kBAdobe PDF

OPEN

NoneView/Download
07.Chapter5 Conclusions.pdf17.42 kBAdobe PDF

OPEN

NoneView/Download
08.References.pdf55.28 kBAdobe PDF

OPEN

NoneView/Download

Page view(s)

229
checked on Dec 11, 2017

Download(s)

1,212
checked on Dec 11, 2017

Google ScholarTM

Check


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.