Please use this identifier to cite or link to this item: https://doi.org/10.1063/1.3062847
Title: Nanolubrication of poly(methyl methacrylate) films on Si for microelectromechanical systems applications
Authors: Satyanarayana, N.
Lau, K.H. 
Sinha, S.K. 
Issue Date: 2008
Source: Satyanarayana, N.,Lau, K.H.,Sinha, S.K. (2008). Nanolubrication of poly(methyl methacrylate) films on Si for microelectromechanical systems applications. Applied Physics Letters 93 (26). ScholarBank@NUS Repository. https://doi.org/10.1063/1.3062847
Source Title: Applied Physics Letters
URI: http://scholarbank.nus.edu.sg/handle/10635/21642
ISSN: 00036951
DOI: 10.1063/1.3062847
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