Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/16319
Title: High Depth Resolution Rutherford Backscattering Spectrometry with a Magnet Spectrometer: Implementation and Application to Thin Film Analysis
Authors: CHAN TAW KUEI
Keywords: High-resolution RBS, HRBS, Thin Lu2O3 films, Magnet Spectrometer, Micro-channel Plate, Focal Plane Detector
Issue Date: 11-Aug-2009
Source: CHAN TAW KUEI (2009-08-11). High Depth Resolution Rutherford Backscattering Spectrometry with a Magnet Spectrometer: Implementation and Application to Thin Film Analysis. ScholarBank@NUS Repository.
Abstract: The High-resolution RBS (HRBS) endstation in CIBA offers thin film analyses with sub-nanometer resolution through a detection system which consists of a spectrometer magnet and a Micro-Channel Plate - Focal Plane Detector (MCP-FPD) assembly. In this thesis, analytical and numerical studies of the spectrometer ion optics were conducted and their results compared to the actual magnet response to ensure the accuracy and quality of the HRBS output spectra. A novel method was developed to correct for the gain variation along the length of the MCP, which is caused by variations in its electron-multiplication gain and physical dimensions. Thin Lu2O3/Si films are of scientific interest as Lu2O3 is a candidate for the next-generation gate dielectric in Metal-Oxide Field Emission Transistors. Ultra-thin Lu2O3/Si films were characterized using HRBS depth profiling in this thesis. The interfacial Si lattice strain imposed by the Lu2O3 film was also measured using the channeling technique.
URI: http://scholarbank.nus.edu.sg/handle/10635/16319
Appears in Collections:Ph.D Theses (Open)

Show full item record
Files in This Item:
File Description SizeFormatAccess SettingsVersion 
01 part Chan Taw Kuei PhD thesis HT041163H.pdf1.14 MBAdobe PDF

OPEN

NoneView/Download
02 part Chan Taw Kuei PhD thesis HT041163H.pdf2.26 MBAdobe PDF

OPEN

NoneView/Download
03 part Chan Taw Kuei PhD thesis HT041163H.pdf2.56 MBAdobe PDF

OPEN

NoneView/Download
04 part Chan Taw Kuei PhD thesis HT041163H.pdf2.78 MBAdobe PDF

OPEN

NoneView/Download

Page view(s)

428
checked on Dec 11, 2017

Download(s)

917
checked on Dec 11, 2017

Google ScholarTM

Check


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.