Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/16067
Title: Theoretical study of the behaviour of sputter-roughened surfaces
Authors: ONG SHEAU WEI
Keywords: Sputter roughened Monte carlo simulation
Issue Date: 14-Oct-2008
Source: ONG SHEAU WEI (2008-10-14). Theoretical study of the behaviour of sputter-roughened surfaces. ScholarBank@NUS Repository.
Abstract: This thesis summarizes the work done in contribution to the understanding of sputtered surfaces in the presence of impurities using atomistic simulation and continuum equation model. The main focus is on the scaling behaviours and parameters that determine the formation of structures on such surfaces.The roughness of the surface is increased with the regularity of the structures dependent on the ease of sputtering for the impurities. The growth exponent is dependent on the time regime and impurity sputtering rate. Formation of structures is strongly dependent on energy distribution.Roughening behaviour is dependent on the degree on inhomogeneity of the surface with the shape of surface structures changes from lenticular to conical when the pining effect of the impurity is strong. The slope of the conical structures can be adjusted by changing the flux and the material.
URI: http://scholarbank.nus.edu.sg/handle/10635/16067
Appears in Collections:Ph.D Theses (Open)

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Chapter 1-Introduction and Aims.pdf78.18 kBAdobe PDF

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Chapter 2-Theoretical Background.pdf158.01 kBAdobe PDF

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Chapter 3-Experimental Background.pdf120.82 kBAdobe PDF

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Chapter 4-Model and Algorithm.pdf130.42 kBAdobe PDF

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Chapter 5-Atomistic-One.pdf5.86 MBAdobe PDF

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Chapter 6a-Atomistic-two species.pdf446.56 kBAdobe PDF

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Chapter 6b-Atomistic-two species.pdf262.33 kBAdobe PDF

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Chapter 6c-Atomistic-two species.pdf250.19 kBAdobe PDF

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Chapter 6d-Atomistic-two species.pdf263.37 kBAdobe PDF

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Chapter 7a-Continuum.pdf561.46 kBAdobe PDF

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Chapter 7b-Continuum.pdf878.47 kBAdobe PDF

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Chapter 7c-Continuum.pdf284.83 kBAdobe PDF

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Chapter 8-Conclusion.pdf47.4 kBAdobe PDF

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Chapter 9-References.pdf102.53 kBAdobe PDF

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Page I - TOC_List.pdf116.68 kBAdobe PDF

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