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Title: Microlens Array Fabrication Technique and its Application in Surface Nanopatterning
Keywords: microlens array, laser processing, lithography, nanopatterning, etching,
Issue Date: 15-Jul-2008
Citation: LIM CHIN SEONG (2008-07-15). Microlens Array Fabrication Technique and its Application in Surface Nanopatterning. ScholarBank@NUS Repository.
Abstract: Microlens array is one of the important components that has been widely integrated into most of the micro systems for optoelectronics, optical communications and other engineering applications. There were a lot of researches had been done on the fabrication techniques of microlens array and its applications. In this thesis, the fabrication of various types of microlens array using the combination of laser assisted patterning method and etching process was introduced. Concave and convex microlens arrays with different dimensions are fabricated, eliminating the need of using expensive photo masks to define the microlenses dimension. This thesis also introduced a technique of surface nanopatterning by the irradiation of laser beam on micro lens arrays. This surface nanopatterning technique enables nanofeatures to be patterned at a high speed over a large area of sample surface. Finally, the optical characteristics of this nanopatterning process are studied extensively as well by simulation of wave propagation through the micro lens array.
Appears in Collections:Ph.D Theses (Open)

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