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Title: Nonlinear vibration of micromechanical resonators
Keywords: nonlinear vibration, micromechanical resonator, MEMS, etch hole, gap reduction
Issue Date: 16-May-2009
Citation: SHAO LICHUN (2009-05-16). Nonlinear vibration of micromechanical resonators. ScholarBank@NUS Repository.
Abstract: In this thesis, a semi-analytic technique is proposed to characterize and model the nonlinearities in micromechanical resonators based on just a few preliminary experimental observations. Using this technique, we study the nonlinear behaviors of a 615kHz fundamental-mode free-free beam resonator, a 550kHz second-mode free-free beam resonator, a 194kHz clamped-clamped beam resonator and a 6.35MHz Lame-mode resonator. The comparison between the flexural mode and bulk mode resonators reveals that bulk mode resonators have much higher resonant frequency, quality factor, power handling capability and much lower amplitude-frequency coefficient than their flexural mode counterparts. Motivated by the superior performance of the bulk mode resonators, in the last chapter of the thesis, two further studies are conducted. Firstly, the effect of etch holes on quality factors is investigated. Secondly, a novel technique is proposed to reduce the gap size of the resonator to sub-micron range using a standard 2um process.
Appears in Collections:Ph.D Theses (Open)

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