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https://scholarbank.nus.edu.sg/handle/10635/15828
DC Field | Value | |
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dc.title | Strain engineering for advanced transistor structure | |
dc.contributor.author | TAN KIAN MING | |
dc.date.accessioned | 2010-04-08T10:57:50Z | |
dc.date.available | 2010-04-08T10:57:50Z | |
dc.date.issued | 2009-05-14 | |
dc.identifier.citation | TAN KIAN MING (2009-05-14). Strain engineering for advanced transistor structure. ScholarBank@NUS Repository. | |
dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/15828 | |
dc.description.abstract | In this thesis, various ideas on strain techniques are explored to further enhance FinFET device performance. The effect of having a SiN capping layer on a tantalum nitride (TaN) metal gate FinFET during source/drain anneal (S/D) was studied. Enhancement in drive current is attributed to the difference in thermal expansion of the various materials. Performance improvement in FinFET with SiGe raised S/D is further achieved with the used of Ge condensation technique and also a novel extended-pi shaped SiGe S/D. In addition, a new CESL liner material, diamond-like carbon (DLC) is also introduced. This material is found to exhibits a much greater intrinsic compressive stress than SiN ever reported. The properties of DLC are characterized and enhancement in drive current on p-channel planar SOI, FinFET and also bulk devices are demonstrated experimentally. Performance of devices in this work is thus greatly enhanced over the control devices. | |
dc.language.iso | en | |
dc.subject | FinFET, Strain, Diamond-Like Carbon, DLC, SiGe | |
dc.type | Thesis | |
dc.contributor.department | ELECTRICAL & COMPUTER ENGINEERING | |
dc.contributor.supervisor | YEO YEE CHIA | |
dc.description.degree | Ph.D | |
dc.description.degreeconferred | DOCTOR OF PHILOSOPHY | |
dc.identifier.isiut | NOT_IN_WOS | |
Appears in Collections: | Ph.D Theses (Open) |
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File | Description | Size | Format | Access Settings | Version | |
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Tan Kian Ming_PhD_Thesis_140509.pdf | 4.88 MB | Adobe PDF | OPEN | None | View/Download |
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