Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/15012
Title: Study on properties of metal nanocrystals for flash memory application
Authors: TAN YEE LIN, ZERLINDA
Keywords: Ni nanocrystals, high-k dielectric, memory, diffusion
Issue Date: 22-Oct-2005
Source: TAN YEE LIN, ZERLINDA (2005-10-22). Study on properties of metal nanocrystals for flash memory application. ScholarBank@NUS Repository.
Abstract: Ni nanocrystals were self assembled on chemical vapor deposited HfO2 and thermally grown SiO2 by sputtering followed by rapid thermal annealing. The effect of initial film thickness, annealing temperature, annealing ambient and substrate on the nanocrystal size and density was investigated. X-ray photoelectron spectroscopy and mass loss analysis by atomic force microscopy shows that Ni penetrates into the 5nm HfO2 after high temperature annealing above 800oC in N2. However, this diffusion can be suppressed by N incorporation into HfO2 by NH3 annealing. Metal-oxide-semiconductor structures were fabricated with Ni nanocrystals embedded in HfO2 and SiO2. Due to the lower tunneling barrier and thinner effective oxide thickness of HfO2 compared to SiO2, an additional counter clockwise hysteresis of 2.1V was achieved using a A?5V compared to a A?15V capacitance-voltage sweep for the Ni nanocrystals embedded in HfO2 and SiO2 respectively. The result is promising for memory application with low operating voltages.
URI: http://scholarbank.nus.edu.sg/handle/10635/15012
Appears in Collections:Master's Theses (Open)

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TITLE PAGE.pdf12.14 kBAdobe PDF

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MAINBODY 1 INTRODUCTION.pdf48.24 kBAdobe PDF

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MAINBODY 2 LITERATURE REVIEW.pdf179.86 kBAdobe PDF

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MAINBODY 3 EXPERIMENTAL.pdf226.04 kBAdobe PDF

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MAINBODY 4 NANOCRYSTAL FORMATION.pdf4.01 MBAdobe PDF

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MAINBODY 5 DIFFUSION SUPPRESION & MEMORY EFFECT OF NI NANOCRYSTALS.pdf3.38 MBAdobe PDF

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MAINBODY 6 CONCLUSION AND RECOMMENDATIONS.pdf48.77 kBAdobe PDF

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MAINBODY 7 REFERENCES.pdf59.81 kBAdobe PDF

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MAINBODY 8 LIST OF PUBLICATIONS.pdf13.9 kBAdobe PDF

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ACKNOWLEDGEMENTS, CONTENTS, SUMMARY, TABLES, FIGURES.pdf69.02 kBAdobe PDF

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