Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/14986
Title: Electrochemical generation and processing of porous silicon
Authors: LIU MINGHUI
Keywords: Porous Silicon, Photoluminescence, Micromachining
Issue Date: 2-Nov-2005
Source: LIU MINGHUI (2005-11-02). Electrochemical generation and processing of porous silicon. ScholarBank@NUS Repository.
Abstract: Porous silicon has been the focus of many studies recently as it has potential applications in the fields of microelectronics, optoelectronics, micromachining etc. due to its unique structural and optical properties. In this thesis, the formation of porous silicon under different conditions has been investigated to find the relationships between the etching processes and morphology/photoluminescence (PL). Porous silicon has also been investigated for the purpose of acting as a sacrificial layer for micromachining applications. By using an ion beam localized areas of damage can be created deep inside the silicon wafers that disrupt the movement of holes to the surface during etching. As a result etching occurs preferentially at the non-damaged areas allowing the silicon to be micro-machined. This technique offers the potential of obtaining macromachined features, such as freestanding structures, multilayered structures and offers the potential to obtain photonic crystals in a single step seta??up.
URI: http://scholarbank.nus.edu.sg/handle/10635/14986
Appears in Collections:Master's Theses (Open)

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