Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/14819
Title: Systematic investigation on the ultratrace analytical monitoring of anionic surfactants on silicon wafer surface by capillary electrophoresis using designed experiments
Authors: HOO SIEOW CHENG
Keywords: Ultra-Trace, Surfactant, Silicon wafer, surface contaminants, Taguchi methodology, Optimization.
Issue Date: 25-May-2005
Source: HOO SIEOW CHENG (2005-05-25). Systematic investigation on the ultratrace analytical monitoring of anionic surfactants on silicon wafer surface by capillary electrophoresis using designed experiments. ScholarBank@NUS Repository.
Abstract: Surface purity of silicon wafers is an important parameter to monitor to achieve high yield of semiconductor devices in a production line. Surfactants are used to facilitate the removal of particles from bare and structured wafers surface by reducing the surface potential. Surfactant residues after the final cleaning steps may be present on wafer surface this will cause detrimental effects on electronic devices. The objective of this work is the development of a robust method for ultra-trace analytical determination of dodecylbenzene sulfonate on silicon wafer surfaces with high hydrofluoric acid matrix using capillary electrophoresis. Taguchi methodology as a systematic optimization tool is used for determination of in-capillary precondition procedure for surfactant analysis. The percent recovery for wafer surface is between of 80% and 108% in vapor phase decomposition (VPD)-matrix. Together with the optimized method and high-resolution detector cell, the LOD and LOQ are 6.5 ppb and 24.5 ppb respectively.
URI: http://scholarbank.nus.edu.sg/handle/10635/14819
Appears in Collections:Master's Theses (Open)

Show full item record
Files in This Item:
File Description SizeFormatAccess SettingsVersion 
Hoo Sieow Cheng MSc Chemistry Anionic Surfactant 2005.pdf1.48 MBAdobe PDF

OPEN

NoneView/Download

Page view(s)

227
checked on Dec 11, 2017

Download(s)

145
checked on Dec 11, 2017

Google ScholarTM

Check


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.