Please use this identifier to cite or link to this item:
https://scholarbank.nus.edu.sg/handle/10635/14040
DC Field | Value | |
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dc.title | Investigations on ohmic contact to p-doped gallium nitride | |
dc.contributor.author | LEE CHEE LEONG | |
dc.date.accessioned | 2010-04-08T10:39:16Z | |
dc.date.available | 2010-04-08T10:39:16Z | |
dc.date.issued | 2004-07-02 | |
dc.identifier.citation | LEE CHEE LEONG (2004-07-02). Investigations on ohmic contact to p-doped gallium nitride. ScholarBank@NUS Repository. | |
dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/14040 | |
dc.description.abstract | In this work, a relatively good ohmic contact (with a specific contact resistance, Rc = 9.80x10-5 I?cm2) to p-doped GaN (~ 2.88 x 1017 cm-3) using Pd(50 nm)/Ni(30 nm)/Au(200 nm) contact has been fabricated. For post-photoresist surface treatment, a N2/Cl2 plasma (5/25 sccm) with a subsequent chemical aqua regia (3HCl: 1 HNO3) treatment has been found to yield a better I-V characteristic than either plasma or aqua regia. It has also been demonstrated that pre-photoresist surface treatment, i.e. N2/Cl2 plasma (5/25 sccm) prior to photoresist coating with a subsequent chemical aqua regia (3HCl: 1 HNO3) treatment, is preferred to post-photoresist plasma treatment. In addition, it has been observed that the ICP and RIE powers for the plasma treatment are critical to obtaining a low specific contact resistance and their optimal values are 500W and 300W, respectively. Lastly, surface roughness of GaN does not seem to have a clear relation with contact characteristic. | |
dc.language.iso | en | |
dc.subject | GaN, Ohmic contact, specific contact resistance, pre-photoresist plasma surface treatment, post-photoresist plasma surface treatment | |
dc.type | Thesis | |
dc.contributor.department | ELECTRICAL & COMPUTER ENGINEERING | |
dc.contributor.supervisor | CHOR ENG FONG | |
dc.contributor.supervisor | TAN LENG SEOW | |
dc.description.degree | Master's | |
dc.description.degreeconferred | MASTER OF ENGINEERING | |
dc.identifier.isiut | NOT_IN_WOS | |
Appears in Collections: | Master's Theses (Open) |
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TITLE PAGE.pdf | 8.96 kB | Adobe PDF | OPEN | None | View/Download | |
ACKNOWLEDGEMENTS.PDF | 11.94 kB | Adobe PDF | OPEN | None | View/Download | |
TABLE OF CONTENTS.pdf | 22.33 kB | Adobe PDF | OPEN | None | View/Download | |
SUMMARY.pdf | 21.38 kB | Adobe PDF | OPEN | None | View/Download | |
LIST OF TABLES-FIGURES-SYMBOLS.pdf | 65.63 kB | Adobe PDF | OPEN | None | View/Download | |
CHAPTER 1.PDF | 83.48 kB | Adobe PDF | OPEN | None | View/Download | |
CHAPTER 2.PDF | 84.11 kB | Adobe PDF | OPEN | None | View/Download | |
CHAPTER 3.PDF | 87.72 kB | Adobe PDF | OPEN | None | View/Download | |
CHAPTER 4.PDF | 267.25 kB | Adobe PDF | OPEN | None | View/Download | |
CHAPTER 5.PDF | 153.36 kB | Adobe PDF | OPEN | None | View/Download | |
CHAPTER 6.PDF | 242.98 kB | Adobe PDF | OPEN | None | View/Download | |
CHAPTER 7.PDF | 32.07 kB | Adobe PDF | OPEN | None | View/Download | |
REFERENCES.pdf | 84.89 kB | Adobe PDF | OPEN | None | View/Download | |
APPENDIX 1.PDF | 2.69 MB | Adobe PDF | OPEN | None | View/Download | |
LIST OF PUBLICATIONS.pdf | 12.93 kB | Adobe PDF | OPEN | None | View/Download |
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