Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/13627
Title: Laser-assisted MEMS fabrication by third harmonic DPSS Nd: YAG laser
Authors: LAN BIN
Keywords: Laser assisted MEMS fabrication by third harmonic DPSS Nd:YAG laser
Issue Date: 5-Mar-2004
Source: LAN BIN (2004-03-05). Laser-assisted MEMS fabrication by third harmonic DPSS Nd: YAG laser. ScholarBank@NUS Repository.
Abstract: The applications of 3rd harmonic DPSS Nd:YAG laser on MEMS microfabrication is investigated. (1) A concentric ring microstructure is formed on substrate surface by laser ablation at defocus positions. The 1st and 2nd highest energy intensities occur at the center and the outmost ring. This microstructure is applied to punch micro-holes for polyimide. It is a high speed and highly efficient via drilling technique. Other applications of micro-channel scribing and beam collimation are also presented. (2) Laser ablation with pocket scanning is carried out on glass. The cracks around ablated edges are reduced significantly compared to direct scanning with much high ablation depth. High quality microstructures with crack size < 10 A?m are obtained. (3) A MEMS component of micro-pin shaft is fabricated on graphite. Fabrication qualities are improved significantly by applying true spiral scanning method and rotation trimming. Surface roughness < 10 A?m and perpendicularity of the cylindrical surface less than 2A? are obtained.
URI: http://scholarbank.nus.edu.sg/handle/10635/13627
Appears in Collections:Master's Theses (Open)

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